Understanding the Reaction Kinetics to Optimize Graphene Growth on Cu by Chemical Vapor Deposition

被引:19
|
作者
Kraus, Juergen [1 ]
Boebel, Lena [1 ]
Zwaschka, Gregor [1 ,2 ]
Guenther, Sebastian [1 ]
机构
[1] Tech Univ Munich, Zentralinst Katalyseforschung, Dept Chem, Phys Chem Schwerpunkt Katalyse, Lichtenbergstr 4, D-85748 Garching, Germany
[2] Fritz HaberInstitut MPG, Abt Phys Chem, Faradayweg 4-6, D-14195 Berlin, Germany
关键词
Graphene; Copper; chemical vapor deposition; Growth kinetics; Thermodynamics; optimized graphene growth; SINGLE-CRYSTAL GRAPHENE; PHOTOELECTRON-SPECTROSCOPY; COPPER FOILS; SURFACE; OXYGEN; CARBON; NUCLEATION; SOLUBILITY; ADSORPTION; HYDROGEN;
D O I
10.1002/andp.201700029
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Understanding and controlling the growth kinetics of graphene is a prerequisite to synthesize this highly wanted material by chemical vapor deposition on Cu, e.g. for the construction of ultra-stable electron transparent membranes. It is reviewed that Cu foils contain a considerable amount of carbon in the bulk which significantly exceeds the expected amount of thermally equilibrated dissolved carbon in Cu and that this carbon must be removed before any high quality graphene may be grown. Starting with such conditioned Cu foils, systematic studies of the graphene growth kinetics in a reactive CH4/H-2 atmosphere allow to extract the following meaningful data: prediction of the equilibrium constant of the graphene formation reaction within a precision of a factor of two, the confirmation that the graphene growth proceeds from a C(ad)-phase on Cu which is in thermal equilibrium with the reactive gas phase, its apparent activation barrier and finally the prediction of the achievable growth velocity of the growing graphene flakes during chemical vapor deposition. As a result of the performed study, growth parameters are identified for the synthesis of high quality monolayer graphene with single crystalline domains of 100-1000 mu m in diameter within a reasonable growth time.
引用
收藏
页数:16
相关论文
共 50 条
  • [41] Atmospheric Pressure Catalytic Vapor Deposition of Graphene on Liquid Sn and Cu-Sn Alloy Substrates
    Saeed, Maryam A.
    Kinloch, Ian A.
    Derby, Brian
    NANOMATERIALS, 2020, 10 (11) : 1 - 15
  • [42] Roles of Transition Metal Substrates in Graphene Chemical Vapor Deposition Growth
    Cheng, Ting
    Sun, Luzhao
    Liu, Zhirong
    Ding, Feng
    Liu, Zhongfan
    ACTA PHYSICO-CHIMICA SINICA, 2022, 38 (01)
  • [43] Growth of carbon nanotubes on graphene by chemical vapor deposition
    Zhao Jian-guo
    Xing Bao-yan
    Yang Hui
    Pan Qi-liang
    Li Zuo-peng
    Liu Zhan-jun
    NEW CARBON MATERIALS, 2016, 31 (01) : 31 - 36
  • [44] Direct Growth of Graphene on a SiGe Alloy Surface by Chemical Vapor Deposition
    Moon, Ji-Yun
    Kim, Seung-il
    Heo, Keun
    Lee, Jae-Hyun
    JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, 2019, 19 (02) : 190 - 195
  • [45] Engineering of Chemical Vapor Deposition Graphene Layers: Growth, Characterization, and Properties
    Yao, Wenqian
    Liu, Hongtao
    Sun, Jianzhe
    Wu, Bin
    Liu, Yunqi
    ADVANCED FUNCTIONAL MATERIALS, 2022, 32 (42)
  • [46] Molecular understanding of the effect of hydrogen on graphene growth by plasma-enhanced chemical vapor deposition
    Wu, Shiwen
    Huang, Dezhao
    Yu, Haoliang
    Tian, Siyu
    Malik, Arif
    Luo, Tengfei
    Xiong, Guoping
    PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2022, 24 (17) : 10297 - 10304
  • [47] Growth Mechanism of Graphene on Graphene Films Grown by Chemical Vapor Deposition
    Kang, Cheong
    Jung, Da Hee
    Lee, Jin Seok
    CHEMISTRY-AN ASIAN JOURNAL, 2015, 10 (03) : 637 - 641
  • [48] Synthesis of bilayer graphene via chemical vapor deposition and its optoelectronic devices
    Yang Yun-Chang
    Wu Bin
    Liu Yun-Qi
    ACTA PHYSICA SINICA, 2017, 66 (21)
  • [49] On the Dynamics of Intrinsic Carbon in Copper during the Annealing Phase of Chemical Vapor Deposition Growth of Graphene
    Khaksaran, M. Hadi
    Kaya, Ismet I.
    ACS OMEGA, 2019, 4 (06): : 9629 - 9635
  • [50] Nucleation and growth of single layer graphene on electrodeposited Cu by cold wall chemical vapor deposition
    Das, Shantanu
    Drucker, Jeff
    NANOTECHNOLOGY, 2017, 28 (10)