Temperature measurements of semiconductor devices - A review

被引：269
作者：
Blackburn, DL [1 ]
机构：
[1] Natl Inst Stand & Technol, Div Semicond Elect, Gaithersburg, MD 20899 USA
来源：
TWENTIETH ANNUAL IEEE SEMICONDUCTOR THERMAL MEASUREMENT AND MANAGEMENT SYMPOSIUM, PROCEEDINGS 2004 | 2004年
关键词：
electrical; measurements; optical; semiconductor; temperature;
D O I：
10.1109/STHERM.2004.1291304
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed, and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.
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收藏
页码：70 / 80
页数：11
相关论文
共 88 条
  • [1] ABID R, 1995, CAN C EL COMP ENG, V1, P586
  • [2] MICRO-RAMAN SPECTROSCOPY FOR CHARACTERIZATION OF SEMICONDUCTOR-DEVICES
    ABSTREITER, G
    [J]. APPLIED SURFACE SCIENCE, 1991, 50 (1-4) : 73 - 78
  • [3] THERMAL-RESISTANCE MEASUREMENTS FOR ALGAAS/GAAS HETEROJUNCTION BIPOLAR-TRANSISTORS
    ADLERSTEIN, MG
    ZAITLIN, MP
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (06) : 1553 - 1554
  • [4] Temperature determination in optoelectronic waveguide modulators
    Allard, M
    Masut, RA
    Boudreau, M
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2000, 18 (06) : 813 - 818
  • [5] ALTET J, 2002, ELECT COOLING
  • [6] Transient temperature measurements and modeling of IGBT's under short circuit
    Ammous, A
    Allard, B
    Morel, H
    [J]. IEEE TRANSACTIONS ON POWER ELECTRONICS, 1998, 13 (01) : 12 - 25
  • [7] Atomic force microscope measurement of channel temperature in GaAs devices
    Anderson, WT
    Mittereder, JA
    Roussos, JA
    [J]. 2001 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 2000, : 31 - 36
  • [8] Channel temperature measurement of GaAs devices using an atomic force microscope
    Anderson, WT
    Mittereder, JA
    Roussos, JA
    [J]. 1999 GAAS RELIABILITY WORKSHOP, PROCEEDINGS, 1999, : 3 - 9
  • [9] AZAR K, 1997, ELECT COOLING
  • [10] BALIGA, 1987, MODERN POWER DEVICES
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