[1] Hahn Schickard, D-79110 Freiburg, Germany
[2] Univ Freiburg, IMTEK, Dept Microsyst Engn, Lab MEMS Applicat, D-79110 Freiburg, Germany
[3] Univ Freiburg, BIOSS, Ctr Biol Signalling Studies, D-79110 Freiburg, Germany
[4] Univ Freiburg, Ctr Biol Syst Anal ZBSA, Lab Microarray Copying, D-79104 Freiburg, Germany