A novel SCR-based protection structure against ESD with efficient multi-finger triggering

被引：0
|
作者：
Azaïs, F [1 ]
Caillard, B [1 ]
Dournelle, S [1 ]
Nouet, P [1 ]
Salomé, P [1 ]
机构：
[1] Univ Montpellier 2, LIRMM, CNRS, Montpellier, France
来源：
ESSDERC 2003: PROCEEDINGS OF THE 33RD EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2003年
关键词：
D O I：
10.1109/ESSDERC.2003.1256850
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of a LSCR. STMSCR is multi-finger compliant thus allowing area-efficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115V/mum is reached for the first time while always ensuring current uniformity in multi-finger structures.
引用
收藏
页码：207 / 210
页数：4
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