Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density

被引:119
作者
Song, Hyun-Cheol [1 ]
Kumar, Prashant [1 ]
Maurya, Deepam [1 ]
Kang, Min-Gyu [1 ]
Reynolds, William T., Jr. [2 ]
Jeong, Dae-Yong [3 ]
Kang, Chong-Yun [4 ,5 ]
Priya, Shashank [1 ]
机构
[1] Virginia Tech, Ctr Energy Harvesting Mat & Syst, Bioinspired Mat & Devices Lab, Blacksburg, VA 24061 USA
[2] Virginia Tech, Dept Mat Sci & Engn, Blacksburg, VA 24061 USA
[3] Inha Univ, Dept Mat Sci Engn, Incheon 22212, South Korea
[4] Korea Inst Sci Technol, Ctr Elect Mat, Seoul 02792, South Korea
[5] Korea Univ, Grad Sch Converging Sci & Technol, KU KIST, Seoul 02841, South Korea
基金
美国国家科学基金会;
关键词
Energy harvesting; low resonance frequency; piezoelectric film; spiral structure; LOW-LEVEL; GENERATOR; SENSOR; FABRICATION; COEFFICIENTS; FILMS;
D O I
10.1109/JMEMS.2017.2728821
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<200 Hz) and acceleration (<0.25 g). High quality Pb(Zr0.48Ti0.52)O-3 (PZT) film with 1.8 mu m-thickness exhibiting remanent polarization of 36.2 mu C/cm(2) and longitudinal piezoelectric constant of 155 pm/V was synthesized to achieve high efficiency mechanical to electrical conversion. The experimental results demonstrate an ultra-low natural frequency of 48 Hz for MEMS harvester. This is one of the lowest resonance frequency reported for the piezoelectric MEMS energy harvester. Further, the position of the natural frequency was controlled by modulating the number of spiral turns and weight of the proof mass. The vibration mode shape and stress distribution were validated through a finite element analysis. The maximum output power of 23.3 nW was obtained from the five turns spiral MEMS energy harvester excited at 0.25 g acceleration and 68Hz. The normalized area and the volumetric energy density were measured to be 5.04 x 10(-4) mu W/mm(2) . g(2) . Hz and 4.92 x 10(-2) mu W/mm(3) . g(2) . Hz, respectively. [2017-0018]
引用
收藏
页码:1226 / 1234
页数:9
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