Application of scanning probe methods for electronic and magnetic device fabrication, characterization, and testing

Selected examples of the application of scanning probe methods for the fabrication, characterization, and testing of electronic and magnetic devices are presented. In particular, promising combinations of conventional photolithography or e-beam lithography with scanning probe methods are described. The combination of atomic-scale self-organization processes with scanning probe microscopy and manipulation experiments possibly can lead to a novel class of atomic-scale devices which could be fabricated on a reasonable time scale. (C) 1996 American Vacuum Society.