Sensitivity of Resistive Transition of Sputter-Deposited TiO2 Films to Electrode Material

被引:0
|
作者
Kawashima, N. [1 ]
Sato, S. [1 ]
Omura, Y. [1 ]
机构
[1] Kansai Univ, Grad Sch Sci & Engn, Suita, Osaka 5648680, Japan
关键词
Resistive transition; TiO2; film; electrode materials;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper discusses the influence of top-electrode (TE) and bottom-electrode (BE) materials on the resistive transition of sputter-deposited TiO2 films. The electronic characteristics of the TiO2 films are elucidated from the physical mechanism of resistive transition.
引用
收藏
页码:72 / 73
页数:2
相关论文
共 50 条
  • [21] Structural, electrical and optical propel-ties of sputter-deposited Nb-doped TiO2 (TNO) polycrystalline films
    Yamada, Naoomi
    Hitosugi, Taro
    Hoang, Ngoc Lam Huong
    Furubayashi, Yutaka
    Hirose, Yasushi
    Konuma, Seiji
    Shimada, Toshihiro
    Hasegawa, Tetsuya
    THIN SOLID FILMS, 2008, 516 (17) : 5754 - 5757
  • [22] Magnetostriction in polycrystalline sputter-deposited TbDyFe films
    Williams, P.I.
    Lord, D.G.
    Grundy, P.J.
    Journal of Applied Physics, 1994, 75 (10 pt 1):
  • [23] In situ stress measurements of sputter-deposited films
    Honda, N
    Shoji, F
    Kidoguchi, S
    Hamada, Y
    Nagata, M
    Oura, K
    SENSORS AND ACTUATORS A-PHYSICAL, 1997, 62 (1-3) : 663 - 667
  • [24] Microstructure of sputter-deposited strontium titanate films
    Nakahara, Shohei
    Kim, Deok-Yang
    Kim, Jae Jin
    Hwang, James C.M.
    Microscopy, 2011, 60 (02): : 133 - 142
  • [25] FECR SPUTTER-DEPOSITED FILMS WITH PERPENDICULAR ANISOTROPY
    SAIKI, K
    SAITO, K
    ONISHI, K
    NUMATA, T
    INOKUCHI, S
    SAKURAI, Y
    IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) : 1471 - 1473
  • [26] FRICTIONAL DURABILITY OF SPUTTER-DEPOSITED FLUOROCARBON FILMS
    YAMADA, Y
    NAGAYAMA, Y
    TANAKA, K
    JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 1993, 38 (09) : 817 - 824
  • [27] BACKSCATTERING SPECTROMETRY ON AR SPUTTER-DEPOSITED FILMS
    KAZAMA, NS
    FUJIMORI, H
    SCIENCE REPORTS OF THE RESEARCH INSTITUTES TOHOKU UNIVERSITY SERIES A-PHYSICS CHEMISTRY AND METALLURGY, 1983, 31 (01): : 16 - 27
  • [28] Oxygen in sputter-deposited ZnTe thin films
    Merita, S
    Krämer, T
    Mogwitz, B
    Franz, B
    Polity, A
    Meyer, BK
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 4, 2006, 3 (04): : 960 - +
  • [29] Chemistry of Sputter-Deposited Lithium Sulfide Films
    Klein, Michael J.
    Veith, Gabriel M.
    Manthiram, Arumugam
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2017, 139 (31) : 10669 - 10676
  • [30] Structural transition in sputter-deposited amorphous germanium films by aging at ambient temperature
    Okugawa, M.
    Nakamura, R.
    Ishimaru, M.
    Watanabe, K.
    Yasuda, H.
    Numakura, H.
    JOURNAL OF APPLIED PHYSICS, 2016, 119 (21)