Microfabricated implantable pressure sensor for flow measurement

被引：0

作者：

Liu, Sheng ^{[1
]}

Farrow, Reginald ^{[1
]}

Zunino, James L., III ^{[2
]}

Lim, Hee C. ^{[1
]}

Federici, John ^{[1
]}

Thomas, Gordon ^{[1
]}

机构：

[1] New Jersey Inst Technol, Dept Phys, Newark, NJ 07102 USA

[2] US Army ARDEC, Army Corros Off, Picatinny Arsenal, NJ 07806 USA

来源：

RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VII | 2008年 / 6884卷

关键词：

flowmeter; pressure sensor; MEMS; resonant frequency;

D O I：

10.1117/12.763740

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A RF wireless capacitive pressure sensor is developed. The sensor has integrated inductor with the pressure sensitive capacitor as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied pressure. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139MPa. The sensor has size of 10 mm x 4 mm x0.5 um. The sensor presents a pressure sensitivity of 1.65MHZ/cmH(2)O in pressure range of 0-20 cmH(2)O. The deflection of different-shape of membranes is discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.

引用

页数：10

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