InAs/GaAs Quantum Dot Lasers on Silicon-on-Insulator Substrates by Metal-Stripe Wafer Bonding

被引:30
|
作者
Jhang, Yuan-Hsuan [1 ,2 ]
Tanabe, Katsuaki [1 ,2 ]
Iwamoto, Satoshi [1 ,2 ]
Arakawa, Yasuhiko [1 ,2 ]
机构
[1] Univ Tokyo, Inst Ind Sci, Tokyo 1138654, Japan
[2] Univ Tokyo, Inst Nano Quantum Informat Elect, Tokyo 1138654, Japan
基金
日本学术振兴会;
关键词
Wafer bonding; semiconductor quantum dot laser; photonic integrated circuits; silicon photonics; GAAS; DEPENDENCE;
D O I
10.1109/LPT.2015.2398465
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
InAs/GaAs quantum dot (QD) lasers on silicon-on-insulator substrates with Si rib structures are fabricated by metal-stripe wafer bonding, where the metal strips work not only as the bonding layer but also as electrodes. Our Fabry-Perot lasers operate with a threshold current density of 520 A . cm(-2) for the broad-area laser, and a threshold current of 110 mA for the ridge laser. The bonded lasers exhibit an InAs QD ground-state lasing at 1.3 mu m at room temperature.
引用
收藏
页码:875 / 878
页数:4
相关论文
共 50 条
  • [1] Fabrication of electrically pumped InAs/GaAs quantum dot lasers on Si substrates by Au-mediated wafer bonding
    Tanabe, Katsuaki
    Guimard, Denis
    Bordel, Damien
    Iwamoto, Satoshi
    Arakawa, Yasuhiko
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 2, 2011, 8 (02): : 319 - 321
  • [2] High-Temperature 1.3 μm InAs/GaAs Quantum Dot Lasers on Si Substrates Fabricated by Wafer Bonding
    Tanabe, Katsuaki
    Rae, Timothy
    Watanabe, Katsuyuki
    Arakawa, Yasuhiko
    APPLIED PHYSICS EXPRESS, 2013, 6 (08)
  • [3] 1.3 μm InAs/GaAs quantum dot lasers on Si substrates by low-resistivity, Au-free metal-mediated wafer bonding
    Tatsumi, Tomohiko
    Tanabe, Katsuaki
    Watanabe, Katsuyuki
    Iwamoto, Satoshi
    Arakawa, Yasuhiko
    JOURNAL OF APPLIED PHYSICS, 2012, 112 (03)
  • [4] Improving Reliability of InAs Quantum Dot Lasers on Silicon Substrates
    Selvidge, Jennifer
    Norman, Justin
    Jung, Daehwan
    Hughes, Eammon
    Salmon, Michael
    Bowers, John
    Herrick, Robert
    Mukherjee, Kunal
    2019 IEEE PHOTONICS CONFERENCE (IPC), 2019,
  • [5] Origin of Defect Tolerance in InAs/GaAs Quantum Dot Lasers Grown on Silicon
    Liu, Zizhuo
    Martin, Mickael
    Baron, Thierry
    Chen, Siming
    Seeds, Alwyn
    Penty, Richard
    White, Ian
    Liu, Huiyun
    Hantschmann, Constanze
    Tang, Mingchu
    Lu, Ying
    Park, Jae-Seong
    Liao, Mengya
    Pan, Shujie
    Sanchez, Ana
    Beanland, Richard
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2020, 38 (02) : 240 - 248
  • [6] Gain Switching of Monolithic 1.3 μm InAs/GaAs Quantum Dot Lasers on Silicon
    Hantschmann, Constanze
    Vasil'ev, Peter P.
    Chen, Siming
    Liao, Mengya
    Seeds, Alwyn J.
    Liu, Huiyun
    Penty, Richard, V
    White, Ian H.
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2018, 36 (18) : 3837 - 3842
  • [7] WAFER BONDING TECHNOLOGY FOR SILICON-ON-INSULATOR APPLICATIONS - A REVIEW
    MITANI, K
    GOSELE, UM
    JOURNAL OF ELECTRONIC MATERIALS, 1992, 21 (07) : 669 - 676
  • [8] Investigation into the InAs/GaAs quantum dot material epitaxially grown on silicon for O band lasers
    Tang, Tianyi
    Yu, Tian
    Yang, Guanqing
    Sun, Jiaqian
    Zhan, Wenkang
    Xu, Bo
    Zhao, Chao
    Wang, Zhanguo
    JOURNAL OF SEMICONDUCTORS, 2022, 43 (01)
  • [9] Modeling and simulation of InAs/GaAs quantum dot lasers
    吕少锋
    Ivo Montrosset
    Mariangela Gioannini
    宋书中
    马建伟
    OptoelectronicsLetters, 2011, 7 (02) : 122 - 125
  • [10] Modeling the temperature characteristics of InAs/GaAs quantum dot lasers
    Rossetti, Marco
    Fiore, Andrea
    Sek, Grzegorz
    Zinoni, Carl
    Li, Lianhe
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (02)