100W 1st Generation Laser-Produced Plasma light source system for HVM EUV lithography

被引：33

作者：

Mizoguchi, Hakaru ^{[1
]}

Abe, Tamotsu ^{[2
]}

Watanabe, Yukio ^{[2
]}

Ishihara, Takanobu ^{[2
]}

Ohta, Takeshi ^{[2
]}

Hori, Tsukasa ^{[2
]}

Yanagida, Tatsuya ^{[2
]}

Nagano, Hitoshi ^{[2
]}

Yabu, Takayuki ^{[2
]}

Nagai, Shinji ^{[2
]}

Soumagne, Georg ^{[2
]}

Kurosu, Akihiko ^{[2
]}

Nowak, Krzysztof M. ^{[2
]}

Suganuma, Takashi ^{[2
]}

Moriya, Masato ^{[2
]}

Kakizaki, Kouji ^{[2
]}

Sumitani, Akira ^{[2
]}

Kameda, Hidenobu ^{[1
]}

Nakarai, Hiroaki ^{[1
]}

Fujimoto, Junichi ^{[1
]}

机构：

[1] Gigaphoton Japan, 400 Yokokura Shinden, Oyama, Tochigi 3238558, Japan

[2] EUVA Komatsu Japan, Hiratsuka, Kanagawa 2548567, Japan

来源：

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY II | 2011年 / 7969卷

关键词：

EUV light source; laser produced plasma; CO2; laser; EUV; Lithography;

D O I：

10.1117/12.880382

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We reported 1st generation Laser-Produced Plasma source system "ETS" device for EUV lithography one year ago(1)). In this paper we update performance status of the 1st generation system. We have improved the system further, maximum burst power is 104W (100kHz, 1 mJ EUV power @ intermediate focus), laser-EUV conversion efficiency is 2.5%. Also continuous operation time is so far up to 8 hours with 5% duty cycle is achieved. We have investigated EUV plasma creation scheme by small experimental device which is facilitated 10Hz operation (maximum). We have proposed double pulse method to create LPP plasma efficiently. This moment we found out 3.3% conversion efficiency operation condition. Based on the engineering data of ETS and small experimental device, now we are developing 2(nd) generation HVM source; GL200E. The device consists of the original concepts (1) CO2 laser driven Sn plasma, (2) Hybrid CO2 laser system that is combination of high speed (> 100kHz) short pulse oscillator and industrial cw-CO2, (3) Magnetic mitigation, and (4) Double pulse EUV plasma creation. The preliminary data are introduced in this paper.

引用

页数：12

共 13 条

[1]

Endo A, 2007, P SPIE, V6517

[2]

Fujimoto Junichi, 2011, P SOC PHOTO-OPT INS, V7969, P7969

[3]

HARNED N, 2007, P SPIE, V6517

[4]

Hori Tsukasa, 2010, 2010 SEMATECHEUVL S, pSO

[5]

Hoshino H., 2008, P SPIE, V6921

[6]

Miura T., 2008, P SPIE, V6921

[7]

Mizoguchi H., 2010, P SPIE, V7636

[8]

Mizoguchi Hakaru, 2011, P SPIE, V7969, P7969

[9]

Mizoguchi Hakaru, 2010, 2010 SEMATECHEUVL S, pSO

[10]

Nishihara K., 2005, EUV SOURCES LITHOGRA

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