New design techniques and alignment methods for CGH-null testing of aspheric surface

被引:3
作者
Kang Guo guo [1 ]
Xie Jing-Hui [1 ]
Liu Yi [2 ]
机构
[1] Beijing Inst Technol, Sch Informat Sci & Technol, Beijing 100081, Peoples R China
[2] China Precis Engn Inst Aircraft Ind, Lab Ultra Precis Machining Aircraft Sci & Technol, Beijing 100076, Peoples R China
来源
INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2007: OPTOELECTRONIC SYSTEM DESIGN, MANUFACTURING, AND TESTING | 2008年 / 6624卷
关键词
interferometric test; Computer-generated hologram; laser writing machine; asphere;
D O I
10.1117/12.791080
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The entire process of designing the test setup with a computer-generated hologram (CGH), fabricating the CGH with a laser direct writing system and performing the CGH-null test of an asphere will be described in detail. New considerations in designing the null corrector with calculating CGH's phase function, filtering off unwanted diffraction orders and aligning CGH to the interferometer are discussed. A laser writing machine is used to fabricate designing patterns onto plane substrate and substrate figure error, pattern distortion, etching and duty cycle variations that influence the reconstructed wavefront are quantitatively analyzed in theory and corresponding error equations are obtained. The CGH used for measuring a paraboloid mirror is designed and fabricated. Experimental results of interferometric CGH-null test are presented.
引用
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页数:8
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