Enhanced laser crystallization of thin film amorphous molybdenum disulfide (MoS2) by means of pulsed laser ultrasound

被引:9
|
作者
Wuenschell, J. K. [1 ,2 ]
Helvajian, H. [1 ]
机构
[1] Aerosp Corp, 300 S Douglas St, El Segundo, CA 90245 USA
[2] Natl Energy Technol Lab, 626 Cochrans Mill Rd,POB 10940, Pittsburgh, PA 15236 USA
来源
OPTICS EXPRESS | 2019年 / 27卷 / 04期
关键词
LAYER MOS2; ATTENUATION; TRANSITION; DIFFUSION; DEPENDENCE; STRAIN;
D O I
10.1364/OE.27.005859
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Experimental evidence is presented that pulsed laser generated ultrasound can reduce the power necessary to phase convert a nm-scale amorphous film into the crystalline phase. The amount of energy carried by pulsed ultrasound is scant when compared to the CW laser power used to crystallize but the effect is substantial. The evidence points to the extraordinary effects possible when a small energy perturbation is applied at a critical juncture in dynamical systems. The candidate system is MoS2 (10 nm) sputtered on yttrium-stabilized zirconia single crystal substrate. A focused CW laser elevates the film - initially in a metastable disordered phase - to the order-disorder conversion (crystallization) temperature. Approximately 25 spot sizes removed from the heating source is a second, high repetition rate laser that induces ultrasonic excitation within the film/substrate via thermoelastic action. The processing is done on a moving stage with direct write patterning control. High resolution ex situ Raman spectroscopy, optical profilometry, and TEM are used to characterize the converted material. For this experimental configuration, we measure a 10% reduction in the heating power required to initiate crystalline formation. The measured phenomenon cannot be attributed to excess thermal energy supplied by the ultrasonic laser. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:5859 / 5873
页数:15
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