Langmuir-Blodgett films in metal-silicon contacts

被引:0
|
作者
Pan, ETS
Nicolet, MA
机构
[1] California Inst of Technology, Pasadena, CA
关键词
Langmuir-Blodgett films; silicide formation; backscattering spectrometry;
D O I
10.1016/S0254-0584(96)01810-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
To what extent two, four or eight Langmuir-Blodgett films of omega-tricosenoic acid (CH2(CH2)(20)COOH) deposited on a silicon wafer will retard the thermally induced reaction of a superimposed nickel film with the silicon substrate is investigated using MeV He backscattering spectrometry as an analytical tool to detect the presence or absence of a reaction in the range of 200-400 degrees C annealing for 30 min in argon at atmospheric pressure. A few pairs of Langmuir-Blodgett films can raise the onset of a reaction from 200 degrees C to above 400 degrees C. A single pair can do likewise when it is polymerized by a 2 keV electron beam. The hypothesis that the films break down chemically - in the limit to a bare carbon layer - upon thermal annealing or electron-beam irradiation qualitatively explains the observations.
引用
收藏
页码:269 / 273
页数:5
相关论文
共 50 条
  • [1] LANGMUIR-BLODGETT FILMS
    AGARWAL, VK
    PHYSICS TODAY, 1988, 41 (06) : 40 - 46
  • [2] LANGMUIR-BLODGETT FILMS
    BARRAUD, A
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1985, 40 (227): : 359 - 365
  • [3] LANGMUIR-BLODGETT FILMS
    PETERSON, IR
    GIRLING, IR
    SCIENCE PROGRESS, 1985, 69 (276) : 533 - 550
  • [4] LANGMUIR-BLODGETT FILMS
    RICHARDSON, T
    CHEMISTRY IN BRITAIN, 1989, 25 (12) : 1218 - &
  • [5] LANGMUIR-BLODGETT FILMS
    ROBERTS, GG
    CONTEMPORARY PHYSICS, 1984, 25 (02) : 109 - 128
  • [6] LANGMUIR-BLODGETT FILMS
    PETTY, MC
    ENDEAVOUR, 1983, 7 (02) : 65 - 69
  • [7] Structure analysis of Langmuir and Langmuir-Blodgett films with metal complexes
    Yoo, SY
    Shin, HK
    Jeong, H
    Park, JC
    Kwon, YS
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS SCIENCE AND TECHNOLOGY SECTION A-MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1999, 337 : 357 - 360
  • [8] Metal-incorporated Langmuir monolayers and Langmuir-Blodgett films
    He, WJ
    Zhu, LG
    Guo, ZJ
    CHINESE JOURNAL OF INORGANIC CHEMISTRY, 2004, 20 (07) : 753 - 762
  • [9] Langmuir-Blodgett films in high-pressure rolling contacts
    Ratoi, M
    Spikes, HA
    Bovington, C
    TRIBOLOGY TRANSACTIONS, 2003, 46 (01) : 24 - 30
  • [10] 1/f noise in Langmuir-Blodgett films on silicon
    Malik, S
    Ray, AK
    Bruce, S
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (05) : 453 - 458