A Novel Gas Sensor in the Form of Micro-machined Resonator and its Readout Circuit

被引：0

作者：

Xue, Bing-Ze ^{[1
]}

Chao, Paul C. -P. ^{[2
]}

Lin, Bor-Shyh ^{[1
]}

Tsai, Chun-Yin ^{[3
]}

Chen, Tsung-Lin ^{[3
]}

Liao, Hsin-Hao ^{[4
]}

Tsai, Hann-Huei ^{[4
]}

Juang, Ying-Zong ^{[4
]}

机构：

[1] Natl Chiao Tung Univ, Inst Imaging & Biomed Photon, Tainan, Taiwan

[2] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu, Taiwan

[3] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu, Taiwan

[4] CIC, Natl Chip Implementat Ctr, Tainan, Taiwan

来源：

2011 IEEE SENSORS | 2011年

关键词：

A micro-machined resonator; a feed-through noise reduction circuit; readout circuit; gas sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study presents a novel gas sensor in the form of a micro-machined resonator and its readout circuit. The resonator has the structure of clamped-clamped beams with thermal actuation and piezo-resistive sensing that supports a plate capable of being attached with test gas molecules to detect gas concentration. The purpose of this study was to design a new gas sensor readout system for a clamped-clamped beam resonator with thermal actuation and piezo-resistive sensing and also presents a new approach to reject the feed-through noise. The sensor is driven by a DDS module and power amplifier, and then sense the vibrations by piezo-resistivity. The piezo-resistivity is detected by a Wheatstone bridge circuits. The carried signal of modulation is set in Wheatstone bridge circuits. An instrumentation amplifier adjusts the gain to the appropriate amplitude. The circuit with reduction on feed-through noise increases the SNR. Square wave conversion circuit and PFD process the signal and the driver reference signal to detect phase difference. The data of phase difference is counted into a microcontroller dsPIC4011 and then the data being transmitted to the computer by RS232 to a USB adapter. Finally, the whole circuit is implemented by using TSMC 0.35 mu m 2P4M process and one-step post-processing.

引用

页码：1149 / 1152

页数：4

共 6 条

[1] Hagleitner G., 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177), P246, DOI 10.1109/ISSCC.2001.912623
[2] Possibility of a femtogram mass biosensor using a self-sensing cantilever
Hosaka, S
Chiyoma, T
Ikeuchi, A
Okano, H
Sone, H
Izumi, T
[J]. CURRENT APPLIED PHYSICS, 2006, 6 (03) : 384 - 388
[3] Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique
Kim, Sang-Jin
Ono, Takahito
Esashi, Masayoshi
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (08)
[4] Resonating Frequency of a SAD Circuit Loop and Inner Microcantilever in a Gas Sensor
Li, Peng
Zhao, Jiahao
Yu, Shijie
Guan, Liu
You, Zheng
[J]. IEEE SENSORS JOURNAL, 2010, 10 (02) : 316 - 320
[5] A Novel Micro-Electrostatic Field Sensor Based on Parallel-Plate Resonator
Peng, Chunrong
Xia, Shanhong
[J]. 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 1092 - 1095
[6] Tsai Chun-Yin, 2009, P 35 INT C MICR NAN

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