Specific features of the morphology of titanium oxide films prepared by pulling silicon substrates from a solution

被引：1
|
作者：
Belov, A. N. [1 ]
Gavrilin, I. M. [1 ]
Gavrilov, S. A. [1 ]
Dronov, A. A. [1 ]
机构：
[1] Tech Univ, Moscow Inst Elect Technol, Zelenograd 124498, Moscow Oblast, Russia
来源：
SEMICONDUCTORS | 2011年 / 45卷 / 13期
关键词：
Continuous Film; Titanium Isopropoxide; Globule Size; Titanium Tetraisopropoxide; Propoxide;
D O I：
10.1134/S1063782611130045
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The formation of thin titanium oxide films by pulling substrates from an alcohol solution of titanium tetraisopropoxide has been investigated. It is shown that the deposited titanium oxide layer consists of a continuous film and titanium oxide globules on its surface. It is found that the density and height of the globules depend on the pulling rate from the solution and the relative humidity in the working chamber, while the thickness of the continuous titanium oxide film is relatively constant.
引用
收藏
页码：1653 / 1655
页数：3
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