Film growth;
First layer;
Interface;
Mismatch;
Morphology;
Molecular dynamics;
EMBEDDED-ATOM METHOD;
THIN-FILM;
AL;
SURFACE;
DIFFUSION;
D O I:
10.1016/j.apsusc.2015.05.076
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
We investigate aluminum thin film growth on Ni(1 0 0) substrate by means of molecular dynamics simulation. Embedded Atom Method interaction potential is considered. The simulation is performed at 300 K using an incident energy of 1 eV. The substrate-grown film interface shows the coexistence of hexagonal and fourfold structures in the first layer during the initial stage of deposition. As the deposition proceeds, the hexagonal geometry transforms to fourfold one which becomes dominant toward the end of deposition. The coverage of this layer exceeded 100%. Moreover, the deposited Al atoms with fourfold geometryadopt the lattice parameter of Ni as the thickness of deposited film increases. The interface mismatch investigation revealed that the roughness is dictated by how the Al(1 1 1) fits to the Ni(1 0 0) substrate, which may be reflected by a wavy effect occurring in both lateral directions. Furthermore, the film grows by a layer-by-layer mode with a coverage rate greater than 66.7% in the first three layers, while it follows an island mode with a coverage rate lower than the previous value (66.7%) beyond the third layer. Overall, a detailed analysis of each layer growth has established a relationship between the number of deposited atoms and the coverage rate of each layer. (C) 2015 Elsevier B.V. All rights reserved.
机构:
Sci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R ChinaSci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R China
Chen, Xian
Zhang, Jing
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h-index: 0
机构:
Sci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R ChinaSci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R China
Zhang, Jing
Zhao, Yu-Qing
论文数: 0引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Peoples R ChinaSci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R China
机构:
Kunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Yunnan, Peoples R China
Yunnan Open Univ, Kunming 650223, Yunnan, Peoples R ChinaKunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
Wang, Yue
Tian, Guocai
论文数: 0引用数: 0
h-index: 0
机构:
Kunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Yunnan, Peoples R ChinaKunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
机构:
Sci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R ChinaSci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R China
Chen, Xian
Zhang, Jing
论文数: 0引用数: 0
h-index: 0
机构:
Sci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R ChinaSci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R China
Zhang, Jing
Zhao, Yu-Qing
论文数: 0引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Minist Educ, Key Lab Phys Elect & Devices, Xian 710049, Peoples R ChinaSci & Technol Analog Integrated Circuit Lab, Chongqing 401332, Peoples R China
机构:
Kunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Yunnan, Peoples R China
Yunnan Open Univ, Kunming 650223, Yunnan, Peoples R ChinaKunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
Wang, Yue
Tian, Guocai
论文数: 0引用数: 0
h-index: 0
机构:
Kunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China
Kunming Univ Sci & Technol, Fac Met & Energy Engn, Kunming 650093, Yunnan, Peoples R ChinaKunming Univ Sci & Technol, State Key Lab Complex Nonferrous Met Resource Cle, Kunming 650093, Yunnan, Peoples R China