Generation of two-dimensional surface profiles from differential interference contrast (DIC)-images

被引:7
作者
Franz, G [1 ]
Kross, J [1 ]
机构
[1] Tech Univ Berlin, Inst Opt, D-10623 Berlin, Germany
来源
OPTIK | 2001年 / 112卷 / 08期
关键词
Quantitative DIC-Microscopy; polished glass; surface roughness;
D O I
10.1078/0030-4026-00063
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Generation of two-dimensional surface profiles from differential interference contrast (DIC) - images. High quality optical systems require polished optical glasses with remaining roughness smaller than 0.5 nm. To test such surfaces, we need measurement methods which are based on quantitative imaging. The following article will develop such a method.
引用
收藏
页码:363 / 367
页数:5
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