Applications of Carbon Nanotubes Grown by Chemical Vapor Deposition

被引：42
作者：
Robertson, John [1 ]
Zhong, Guofang [1 ]
Esconjauregui, C. Santiago [1 ]
Bayer, Bernhard C. [1 ]
Zhang, Can [1 ]
Fouquet, Martin [1 ]
Hofmann, Stephan [1 ]
机构：
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2012年 / 51卷 / 01期
关键词：
LOW-TEMPERATURE SYNTHESIS; ELECTRICAL-PROPERTIES; ARRAY GROWTH; INTERCONNECT; FUTURE; TECHNOLOGIES; SPECTROSCOPY; NUCLEATION; MECHANISM; THICKNESS;
D O I：
10.1143/JJAP.51.01AH01
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The requirements for using carbon nanotubes as vias and interconnects are described. The growth of high density forests of vertically-aligned carbon nanotubes for interconnect applications by chemical vapor deposition is described. Densities up to 1.4 x 10(13) cm(-2) have been achieved by maintaining a small nanotube diameter. The process integration devices is reviewed. (C) 2012 The Japan Society of Applied Physics
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页数：8
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共 77 条
  • [1] Influence of Alumina Type on the Evolution and Activity of Alumina-Supported Fe Catalysts in Single-Walled Carbon Nanotube Carpet Growth
    Amama, Placidus B.
    Pint, Cary L.
    Kim, Seung Min
    McJilton, Laura
    Eyink, Kurt G.
    Stach, Eric A.
    Hauge, Robert H.
    Maruyama, Benji
    [J]. ACS NANO, 2010, 4 (02) : 895 - 904
  • [2] Carbon nanotube via interconnect technologies: size-classified catalyst nanoparticles and low-resistance ohmic contact formation
    Awano, Y.
    Sato, S.
    Kondo, D.
    Ohfuti, M.
    Kawabata, A.
    Nihei, M.
    Yokoyama, N.
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (14): : 3611 - 3616
  • [3] Carbon Nanotubes for VLSI: Interconnect and Transistor Applications
    Awano, Yuji
    Sato, Shintaro
    Nihei, Mizuhisa
    Sakai, Tadashi
    Ohno, Yutaka
    Mizutani, Takashi
    [J]. PROCEEDINGS OF THE IEEE, 2010, 98 (12) : 2015 - 2031
  • [4] In-situ study of growth of carbon nanotube forests on conductive CoSi2 support
    Bayer, B. C.
    Zhang, C.
    Blume, R.
    Yan, F.
    Fouquet, M.
    Wirth, C. T.
    Weatherup, R. S.
    Lin, L.
    Baehtz, C.
    Oliver, R. A.
    Knop-Gericke, A.
    Schloegl, R.
    Hofmann, S.
    Robertson, J.
    [J]. JOURNAL OF APPLIED PHYSICS, 2011, 109 (11)
  • [5] Support-Catalyst-Gas Interactions during Carbon Nanotube Growth on Metallic Ta Films
    Bayer, B. C.
    Hofmann, S.
    Castellarin-Cudia, C.
    Blume, R.
    Baehtz, C.
    Esconjauregui, S.
    Wirth, C. T.
    Oliver, R. A.
    Ducati, C.
    Knop-Gericke, A.
    Schloegl, R.
    Goldoni, A.
    Cepek, C.
    Robertson, J.
    [J]. JOURNAL OF PHYSICAL CHEMISTRY C, 2011, 115 (11) : 4359 - 4369
  • [6] Catalytic chemical vapor deposition of single-wall carbon nanotubes at low temperatures
    Cantoro, Mirco
    Hofmann, Stephan
    Pisana, Simone
    Scardaci, Vittorio
    Parvez, Atlus
    Ducati, Caterina
    Ferrari, Andrea C.
    Blackburn, Arthur M.
    Wang, Kai-You
    Robertson, John
    [J]. NANO LETTERS, 2006, 6 (06) : 1107 - 1112
  • [7] Capillarity-driven assembly of two-dimensional cellular carbon nanotube foams
    Chakrapani, N
    Wei, BQ
    Carrillo, A
    Ajayan, PM
    Kane, RS
    [J]. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2004, 101 (12) : 4009 - 4012
  • [8] A 1 GHz integrated circuit with carbon nanotube interconnects and silicon transistors
    Close, Gael F.
    Yasuda, Shinichi
    Paul, Bipul
    Fujita, Shinobu
    Wong, H. -S. Philip
    [J]. NANO LETTERS, 2008, 8 (02) : 706 - 709
  • [9] How to switch from a tip to base growth mechanism in carbon nanotube growth by catalytic chemical vapour deposition
    Dijon, J.
    Szkutnik, P. D.
    Fournier, A.
    de Monsabert, T. Goislard
    Okuno, H.
    Quesnel, E.
    Muffato, V.
    De Vito, E.
    Bendiab, N.
    Bogner, A.
    Bernier, N.
    [J]. CARBON, 2010, 48 (13) : 3953 - 3963
  • [10] Dijon J., 2010, IEDM, P32
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