Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications

被引：47

作者：

Namba, Y. ^{[1
]}

Shimomura, T. ^{[1
]}

Fushiki, A. ^{[1
]}

Beaucamp, A. ^{[1
]}

Inasaki, I. ^{[1
]}

Kunieda, H. ^{[2
]}

Ogasaka, Y. ^{[2
]}

Yamashita, K. ^{[2
]}

机构：

[1] Chubu Univ, Dept Mech Engn, Aichi 4878501, Japan

[2] Nagoya Univ, Dept Phys, Nagoya, Aichi 464, Japan

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2008年 / 57卷 / 01期

基金：

日本学术振兴会;

关键词：

optics; polishing; molding die;

D O I：

10.1016/j.cirp.2008.03.077

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electroless nickel is one of the best materials for making optical molding dies, because of its machinability with both single-point diamond turning and polishing, as well as its suitable hardness and durability. This paper deals with the ultra-precision polishing of aspheric molding dies for next-generation hard X-ray telescope mirrors, which require a super smooth surface with a roughness below 0.3 nm root-mean-square (rms). The material was machined using various methods, and a surface roughness of 0.23 nm rms was obtained on aspheric molding dies of 300 mm in diameter. A surface roughness of 0.16 nm rms was achieved on platinum/carbon multilayer mirrors, replicated from plano dies. (c) 2008 CIRP.

引用

页码：337 / 340

页数：4

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