共 50 条
- [41] Optical properties of silicon nanowires array fabricated by metal-assisted electroless etching NEXT GENERATION (NANO) PHOTONIC AND CELL TECHNOLOGIES FOR SOLAR ENERGY CONVERSION, 2010, 7772
- [42] Deep trenches fabricated by laser-induced backside wet etching for guiding light LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VII, 2009, 7201
- [47] LASER-INDUCED ETCHING OF METALS JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C433 - C433
- [49] LASER-INDUCED CHEMICAL ETCHING OF SILICON IN NF3 ATMOSPHERE APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (05): : 465 - 469