Time- and space-resolved measurements of Ar(1s5) metastable density in a microplasma using diode laser absorption spectroscopy

被引：23

作者：

Belostotskiy, Sergey G. ^{[1
]}

Ouk, Tola ^{[1
]}

Donnelly, Vincent M. ^{[1
]}

Economou, Demetre J. ^{[1
]}

Sadeghi, Nader ^{[2
,3
]}

机构：

[1] Univ Houston, Dept Chem & Biomol Engn, Plasma Proc Lab, Houston, TX 77204 USA

[2] Univ Grenoble 1, UMR C5588, Spectrometrie Phys Lab, F-38402 St Martin Dheres, France

[3] Ecole Natl Super Electrochim & Electrome Grenoble, Thermodynam & Physicochim Met Lab, CNRS, F-38402 St Martin Dheres, France

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2011年 / 44卷 / 14期

关键词：

ATMOSPHERIC-PRESSURE MICROPLASMA; PLASMA; ARGON; DISCHARGE; DIAGNOSTICS; ELECTRON; DISPLAY; HELIUM;

D O I：

10.1088/0022-3727/44/14/145202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Time- and space-resolved measurements of Ar(1s(5)) metastable (Ar*) density were carried out in a pulsed dc argon microplasma discharge, using diode laser absorption spectroscopy. The temporal behaviour of metastable density after discharge turn off (in the afterglow) depended on their spatial location in the microplasma. In the early afterglow, the Ar* density decayed monotonically with time in the region around the sheath edge, while in the bulk plasma the Ar* density showed a maximum with time. This behaviour was attributed to electron-ion dissociative recombination. Later in the afterglow, the Ar* decay was everywhere monotonic with time, mainly due to three-body collisional quenching by ground state argon atoms. The time evolution of the Ar* density in the afterglow predicted by a kinetic model is in good agreement with the experimental measurements.

引用

页数：7

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