The effect of contamination of dielectric target surfaces under electron irradiation

被引：19
|
作者：
Rau, E. I. [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect Technol, Moscow 142432, Russia
来源：
APPLIED SURFACE SCIENCE | 2008年 / 254卷 / 07期
关键词：
secondary electron emission; insulators; contamination; second crossover energy point;
D O I：
10.1016/j.apsusc.2007.08.076
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The influence of the contamination film formed under the electron bombardment of the sample surface on the conditions of experimental studies using analytical electron-probe apparatus (scanning electron microscopes, X-ray microanalyzers) is considered. The accompanying artifacts, namely the decreased effective value of the secondary electron emission coefficient and the shifted value of the second crossover energy of primary electrons are calculated. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：2110 / 2113
页数：4
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