[1] Fraunhofer Inst Reliabil & Microintegrat IZM, Gustav Meyer Allee 25, D-13355 Berlin, Germany
[2] Tech Univ Berlin, Microelect Assembly & Joining Technol Div, Gustav Meyer Allee 25, D-13355 Berlin, Germany
[3] Eagleyard Photon GmbH, Rudower Chaussee 29, D-12489 Berlin, Germany