Silicon-On-Nothing Electrostatically Doped Junctionless Tunnel Field Effect Transistor (SON-ED-JLTFET): A Short Channel Effect Resilient Design

被引:13
作者
Kaity, Aishwarya [1 ]
Singh, Sangeeta [1 ]
Kondekar, P. N. [2 ]
机构
[1] Natl Inst Technol Patna, Microelect & VLSI Design, Patna, Bihar, India
[2] IIITDM, Nanoelect & VLSI Lab, Jabalpur, India
关键词
Silicon-on-nothing (SON) technology; Tunnel field effect transistor (TFET); High-K stacked hetero-gate technology; Electrostatic doping; Short channel effects (SCEs); Drain induced barrier lowering (DIBL); CIRCUIT PERFORMANCE; RF PERFORMANCE; THIN-FILMS; FET; DEPOSITION; DEVICE; ANALOG; ZRO2;
D O I
10.1007/s12633-020-00404-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This work investigates the novel device structure, silicon-on-nothing electrostatically doped junctionless tunnel field effect transistor (SON-ED-JLTFET) with high-K stacked hetero-gate technology for its short channel effects (SCEs) immune properties. Here, its analog/RF device performance metrices are also analyzed using calibrated 2-D technology computer-aided design (TCAD) simulation study. This device is expected to exhibit the fundamental advantages of SON technology, i.e. it should be more immune towards SCEs, like threshold voltage roll-off, drain induced barrier lowering (DIBL) even for devices with less than 10 nm channel length. Moreover, owing to its electrostatic doping instead of metallurgical doping, the detrimental doping control issues, such as mobility degradation, higher fabrication thermal budget and statistical random dopant fluctuations (RDFs) can no more degrade the device performance. This helps in realization of more process variations immune design. Here the detailed device sensitivity analysis with respect to the various crucial devices dimensional parameters variation is also carried out.
引用
收藏
页码:9 / 23
页数:15
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