Electronic speckle pattern interferometry with thin beam illumination of miniature reflection and transmission speckling elements for in-plane deformation measurements

被引：7
|
作者：
Petrov, V
Lau, B
机构：
[1] Laser Lab, D-89023 Ulm, Germany
[2] Fachhsch Ulm, Inst Angew Forsch Automatisierungssyst, Lab Tech Opt Lasertech & Optoelekt, D-89028 Ulm, Germany
来源：
OPTICAL ENGINEERING | 1998年 / 37卷 / 08期
关键词：
speckle interferometry; electronic speckle pattern interferometry; ESPI; miniature speckling elements; thin laser beam illumination; holography; HOE; transmission and reflection HOEs;
D O I：
10.1117/1.602008
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new method of electronic speckle pattern interferometry (ESPI) for in-plane deformation measurements is presented. Unlike usual ESPI methods used for in-plane deformation measurements with two symmetrical smooth illuminating waves, we introduce miniature speckling elements and thin laser beam illumination of them. The miniature elements serve for generating two symmetrical speckled waves. These miniature speckling elements are produced as reflection or transmission holograms. Nonholographic speckling elements were also tested. We present a family of flexible electronic speckle pattern interferometers for in-plane deformation analysis based on our method. Due to their simplicity, compactness, and low cost, the devices are ideally suited for industrial automated inspection. Experimental results obtained with the novel ESPI devices are given. (C) 1998 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：2410 / 2415
页数：6
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