An embedded capacitive sensor for in-situ angular detection of micromotor

被引：6
作者：
Yang, Tianyu [1 ,2 ]
Li, Xiaoshi [1 ,2 ]
Sun, Xiangyu [1 ,2 ]
Wang, Yicheng [1 ,2 ]
Chen, Yu [1 ,2 ]
Gong, Dongdong [1 ,2 ]
Du, Yijia [1 ,2 ]
机构：
[1] China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Mianyang, Sichuan, Peoples R China
[2] China Acad Engn Phys, Inst Elect Engn, Mianyang, Sichuan, Peoples R China
来源：
MICROELECTRONICS JOURNAL | 2021年 / 114卷
关键词：
Capacitive sensor; Multi-layer shielding; Sensor structure; VIBRATION;
D O I：
10.1016/j.mejo.2021.105088
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An embedded capacitive sensor in traveling wave ultrasonic motor is proposed for angular detection. Equivalent circuit model of the system is well studied that correlation between sensor structure, parasitic parameters and the property of detection signal is found. Sensor structure is optimized with innovate structural design including multi-layer shielding, planar isolation and differential detection design. The signal-to-noise ratio of the detection signal is found up to 40 dB and the angular detection accuracy during step motion is less than 0.1 degrees.
引用
收藏
页数：6
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