Role of nanoparticles generation in the formation of femtosecond laser-induced periodic surface structures on silicon

被引：14

作者：

Xue, Hongyan ^{[1
]}

Deng, Guoliang ^{[1
]}

Feng, Guoying ^{[1
]}

Chen, Lin ^{[1
]}

Li, Jiaqi ^{[1
]}

Yang, Chao ^{[1
]}

Zhou, Shouhuan ^{[1
,2
]}

机构：

[1] Sichuan Univ, Coll Elect & Informat Engn, Inst Laser & Micro Nano Engn, Chengdu 610064, Sichuan, Peoples R China

[2] North China Res Inst Electroopt, Beijing 100015, Peoples R China

来源：

OPTICS LETTERS | 2017年 / 42卷 / 17期

基金：

中国国家自然科学基金;

关键词：

TEMPERATURE; IRRADIATION; PULSE;

D O I：

10.1364/OL.42.003315

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An initial roughness is assumed in the most accepted Sipe-Drude model to analyze laser-induced periodic surface structures (LIPSS). However, the direct experimental observation for the crucial parameters is still lacking. The generation of nanoparticles and low-spatial frequency LIPSS (LSFL) (LIPSS with a periodicity close to laser wavelength) on a silicon surface upon a single pulse and subsequent pulses irradiation, respectively, is observed experimentally. Finite-difference time-domain (FDTD) simulation indicates that the nanoparticles generated with the first pulse enhance the local electric field greatly. Based on the experimental extrapolated parameters, FDTD-eta maps have been calculated. The results show that the inhomogeneous energy deposition, which leads to the formation of LSFL, is mainly from the modulation of the nanoparticles with a radius of around 100 nm. (C) 2017 Optical Society of America

引用

收藏

页码：3315 / 3318

页数：4

相关论文

共 29 条

[1] SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS [J].

BIRNBAUM, M .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) :3688-&

[2] Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses [J].

Bonse, J ;

Munz, M ;

Sturm, H .

JOURNAL OF APPLIED PHYSICS, 2005, 97 (01)

[3] Tribological performance of femtosecond laser-induced periodic surface structures on titanium and a high toughness bearing steel [J].

Bonse, J. ;

Koter, R. ;

Hartelt, M. ;

Spaltmann, D. ;

Pentzien, S. ;

Hoehm, S. ;

Rosenfeld, A. ;

Krueger, J. .

APPLIED SURFACE SCIENCE, 2015, 336 :21-27

[4] Applications of laser-induced periodic surface structures (LIPSS) [J].

Bonse, Joern ;

Kirner, Sabrina V. ;

Hoehm, Sandra ;

Epperlein, Nadja ;

Spaltmann, Dirk ;

Rosenfeld, Arkadi ;

Krueger, Joerg .

LASER-BASED MICRO- AND NANOPROCESSING XI, 2017, 10092

[5] Laser-Induced Periodic Surface Structures-A Scientific Evergreen [J].

Bonse, Joern ;

Hoehm, Sandra ;

Kirner, Sabrina V. ;

Rosenfeld, Arkadi ;

Krueger, Joerg .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2017, 23 (03) :109-123

[6] Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon [J].

Bonse, Joern ;

Krueger, Joerg .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (03)

[7] On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses [J].

Bonse, Joern ;

Rosenfeld, Arkadi ;

Krueger, Joerg .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (10)

[8] Nanostructured Ag surface fabricated by femtosecond laser for surface-enhanced Raman scattering [J].

Chang, Han-Wei ;

Tsai, Yu-Chen ;

Cheng, Chung-Wei ;

Lin, Cen-Ying ;

Lin, Yen-Wen ;

Wu, Tzong-Ming .

JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2011, 360 (01) :305-308

[9] Experimental and FDTD study of silicon surface morphology induced by femtosecond laser irradiation at a high substrate temperature [J].

Deng, Guoliang ;

Feng, Guoying ;

Zhou, Shouhuan .

OPTICS EXPRESS, 2017, 25 (07) :7818-7827

[10] Crystalline micro/nanostructures fabrication on silicon using femtosecond laser [J].

Deng, Guoliang ;

Yang, Xianheng ;

Feng, Guoying ;

Zhou, Shouhuan .

XX INTERNATIONAL SYMPOSIUM ON HIGH-POWER LASER SYSTEMS AND APPLICATIONS 2014, 2015, 9255