X-ray photoelectron spectroscopy study of electrodeposited nanostructured CeO2 films

被引:102
作者
Wang, AQ
Punchaipetch, P
Wallace, RM
Golden, TD
机构
[1] Univ N Texas, Dept Chem, Denton, TX 76203 USA
[2] Univ N Texas, Dept Mat Sci, Denton, TX 76203 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 03期
关键词
D O I
10.1116/1.1577569
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nanostructured CeO2 films are produced by anodic electrodeposition onto a variety of substrates. The crystal structure and oxidation state of the films are studied by x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS), respectively. Calculations from XRD show that crystallite sizes of the electrodeposited films range from 6-10 nm. Sintering of these films to 700 degreesC increases the grain size to approximately 25 nm. A study of Ce 3d, Ce 4d, O 1s, and the valence-band region indicates that the Ce(IV)/Ce(III) ratio increases with sintering temperature, with features of both Ce4+ and Ce3+ identified by XPS. Ce3d and O 1 s characteristics show that high-temperature sintering of the films facilitates Ce(IV) oxide formation. (C) 2003 American, Vacuum Society.
引用
收藏
页码:1169 / 1175
页数:7
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