Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing

被引：34

作者：

Zhang, Zilong ^{[1
,2
]}

Wu, Haihua ^{[2
]}

Sang, Liwen ^{[3
]}

Huang, Jian ^{[1
]}

Takahashi, Yukiko ^{[4
]}

Wang, Linjun ^{[1
]}

Imura, Masataka ^{[2
]}

Koizumi, Satoshi ^{[2
]}

Koide, Yasuo ^{[5
]}

Liao, Meiyong ^{[2
]}

机构：

[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China

[2] Natl Inst Mat Sci, Namiki 1-1, Tsukuba, Ibaraki 3050044, Japan

[3] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton MANA, Namiki 1-1, Tsukuba, Ibaraki 3050044, Japan

[4] Natl Inst Mat Sci, Res Ctr Magnet & Spintron Mat, Sengen 1-2-1, Ibaraki 3050047, Japan

[5] Natl Inst Mat Sci, Res Network & Facil Serv Div, 1-2-1 Sengen, Tsukuba, Ibaraki 3050047, Japan

来源：

CARBON | 2019年 / 152卷

关键词：

THIN-FILMS; FIELD SENSOR; FABRICATION; MODULUS;

D O I：

10.1016/j.carbon.2019.06.072

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Single-crystal diamond (SCD) is a promising material for micro-electromechanical system (MEMS) devices to achieve high performance and reliability due to its prominent mechanical and physical properties. However, the application of SCD MEMS has not been practically achieved due to the lack of device concept for SCD MEMS. Here, the SCD MEMS resonator based magnetic sensor is successfully realized with integrating of a large magneto-strictive galfenol film on SCD mechanical resonator with high performance. It is concluded that SCD provides a suitable substrate for galfenol film with excellent magnetic properties. Along with the high-quality factor of the SCD MEMS resonator, a high magnetic field sensitivity of 4.83 Hz/mT and an extremely low detectable force of 2.14 x 10(-12) N are achieved. Based on the experimental results, the estimated minimum detectable force, magnetic field and energy reach 1.76 x 10(-)(14) N, 1.42 x 10(-1)9 T and 8.4 x 10(-29) J. The successful fabrication of SCD MEMS magnetic sensor provides a promising strategy for broadening the application of SCD MEMS with merits super to other ones, such as nanoscale to microscale spatial resolution, wide-range magnetic field sensing, high sensitivity, high temperature operation, and facile integration with CMOS. (C) 2019 Elsevier Ltd. All rights reserved.

引用

页码：788 / 795

页数：8

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