Growth of epitaxial strontium barium niobate thin films by solid source metal-organic chemical vapor deposition

被引：17
作者：
Lee, MK
Feigelson, RS
机构：
[1] Dept. of Mat. Sci. and Engineering, Stanford University, Stanford
来源：
JOURNAL OF CRYSTAL GROWTH | 1997年 / 180卷 / 02期
基金：
美国国家科学基金会;
关键词：
strontium barium niobate; thin films; chemical vapor deposition; homo- and heteroepitaxy; waveguides;
D O I：
10.1016/S0022-0248(97)00231-5
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
Strontium barium niobate (SrxBa1-xNb2O6) thin films have been epitaxially grown on (0 0 1)MgO, (1 1 0)MgO and (0 0 1)Sr0.75Ba0.25Nb2O6 substrates by solid source metal-organic chemical vapor deposition. Films became amorphous when the substrate temperature was below 535 degrees C. The crystallinity of the him improved approximately with decreasing growth rate. Film compositions could be controlled by varying source compositions. Single crystalline films were deposited on (0 0 1)Sr0.75Ba0.25Nb2O6 single crystal substrates while films grown on (0 0 1)MgO and (1 1 0)MgO substrates revealed four in-plane orientations. Waveguiding behavior was demonstrated for both TE and TM modes with the films grown on (0 0 1)MgO substrates. The measured refractive indices were in agreement with those of bulk crystal.
引用
收藏
页码：220 / 228
页数：9
相关论文
共 50 条
  • [1] Growth of epitaxial sodium-bismuth-titanate films by metal-organic chemical vapor phase deposition
    Schwarzkopf, J.
    Schmidbauer, M.
    Duk, A.
    Kwasniewski, A.
    Bin Anooz, S.
    Wagner, G.
    Devi, A.
    Fornari, R.
    THIN SOLID FILMS, 2011, 520 (01) : 239 - 244
  • [2] Rapid thermal two-stage metal-organic chemical vapor deposition growth of epitaxial BaTiO3 thin films
    Kreinin, O.
    Kuzmina, N. P.
    Zolotoyabko, E.
    Kaul, A. R.
    THIN SOLID FILMS, 2007, 515 (16) : 6442 - 6446
  • [3] GROWTH OF BORON-NITRIDE THIN-FILMS BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION
    PHANI, AR
    ROY, S
    RAO, VJ
    THIN SOLID FILMS, 1995, 258 (1-2) : 21 - 25
  • [4] Metal-organic chemical vapor deposition and nanoscale characterization of zirconium oxide thin films
    Harasek, S
    Wanzenboeck, HD
    Basnar, B
    Smoliner, J
    Brenner, J
    Stoeri, H
    Gornik, E
    Bertagnolli, E
    THIN SOLID FILMS, 2002, 414 (02) : 199 - 204
  • [5] Metal-organic precursors and chemical vapor deposition
    Valade, L
    Teyssandier, F
    ACTUALITE CHIMIQUE, 1999, (02): : 14 - 21
  • [6] Composition control of barium strontium titanate thin films prepared by chemical vapor deposition
    Kiyotoshi, M
    Eguchi, K
    Imai, K
    Arikado, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (08): : 4487 - 4492
  • [7] Low-temperature growth and orientational control in RuO2 thin films by metal-organic chemical vapor deposition
    Bai, GR
    Wang, A
    Foster, CM
    Vetrone, J
    THIN SOLID FILMS, 1997, 310 (1-2) : 75 - 80
  • [8] Low-temperature growth of ZnO epitaxial films by metal organic chemical vapor deposition
    B.P. Zhang
    N.T. Binh
    K. Wakatsuki
    N. Usami
    Y. Segawa
    Applied Physics A, 2004, 78 : 25 - 28
  • [9] METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION GROWTH OF GAN
    LU, DC
    WANG, D
    WANG, XH
    LIU, XL
    DONG, JR
    GAO, WB
    LI, CJ
    LI, YY
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 29 (1-3): : 58 - 60
  • [10] Metal-organic chemical vapor deposition of β-In2S3 thin films using a single-source approach
    M. Afzaal
    D. Crouch
    P. O'Brien
    Jin-Ho Park
    Journal of Materials Science: Materials in Electronics, 2003, 14 : 555 - 557
12345