共 16 条
[5]
Li F., SURF ENG
[6]
Mattox DM, 2010, HANDBOOK OF PHYSICAL VAPOR DEPOSITION (PVD) PROCESSING, 2ND EDITION, P1
[8]
Formation of macroparticles in are ion-plated nitride coatings
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2001, 19 (02)
:703-705