Modeling the Charge-Transfer Resistance to Determine the Role of Guar and Activated Polyacrylamide in Copper Electrodeposition

被引:10
作者
Fabian, C. P. [1 ,2 ]
Ridd, M. J. [2 ]
Sheehan, M. E. [1 ]
Mandin, Ph. [3 ]
机构
[1] James Cook Univ, Sch Engn, Townsville, Qld 4811, Australia
[2] James Cook Univ, Sch Pharm & Mol Sci, Townsville, Qld 4811, Australia
[3] ENSCP, LECA UMR CNRS 7575, Lab Electrochim & Chim Analyt, F-75231 Paris 05, France
关键词
ROTATING CYLINDER ELECTRODE; MASS-TRANSPORT PROPERTIES; POLYETHYLENE-GLYCOL; DIFFUSION IMPEDANCE; DAMASCENE PROCESS; DEPOSITION; ADDITIVES; CHLORIDE; BATH; ADSORPTION;
D O I
10.1149/1.3176879
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
In this paper, we explore the effects of two organic additives (guar and a selectively hydrolyzed polyacrylamide) in the presence of chloride ions on copper electrodeposition using cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) at a rotating cylinder electrode (RCE). This paper also demonstrates that the CV and EIS results are consistent and that the selectively hydrolyzed polyacrylamide, "activated polyacrylamide" (APAM), acts as a suppressor/inhibitor at the cathode/electrolyte interface, whereas guar does not. This paper presents an EIS measurement model for the effect of APAM + Cl- on a copper cathode. The EIS model was applied to data obtained at a potential of -470 mV vs a mercurous-mercuric sulfate reference electrode (MSE) at 45 degrees C. A comparison between the effect of APAM + Cl- and guar + Cl- was conducted at -490 mV (vs MSE) at 45 degrees C. APAM + Cl- was also investigated at -445 mV (vs MSE) at 65 degrees C. EIS was used to determine the effect of APAM + Cl- or guar + Cl- aging on the charge-transfer resistance using the RCE. CV was used to determine their effect on the polarization of the electrode. The EIS and CV results are consistent. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3176879] All rights reserved.
引用
收藏
页码:D400 / D407
页数:8
相关论文
共 49 条
[1]  
Bard A.J., 2001, Electrochemical Methods: Fundamentals and Applications, V2nd
[2]  
BARSOUKOV E, 2005, ELECTROCHEMICAL IMPE
[3]  
Budevski E., 1996, ELECT PHASE FORMATIO
[4]   Interactions of chloride and polyethylene glycol in acidic copper sulfate electrolyte [J].
Chen, Hung-Ming ;
Parulekar, Satish J. ;
Zdunek, Alan .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (05) :D341-D348
[5]   Copper electrodissolution in 1 M HCl at low current densities. II. Electrochemical impedance spectroscopy study [J].
Diard, JP ;
Le Canut, JM ;
Le Gorrec, B ;
Montella, C .
ELECTROCHIMICA ACTA, 1998, 43 (16-17) :2485-2501
[6]   A mathematical model for the radially dependent impedance of a rotating disk electrode [J].
Durbha, M ;
Orazem, ME ;
Tribollet, B .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (06) :2199-2208
[7]   Rotating cylinder electrode study of the effect of activated polyacrylamide on surface roughness of electrodeposited copper [J].
Fabian, C. ;
Ridd, M. J. ;
Sheehan, M. .
HYDROMETALLURGY, 2006, 84 (3-4) :256-263
[8]   Assessment of activated polyacrylamide and guar as organic additives in copper electrodeposition [J].
Fabian, C. P. ;
Ridd, M. J. ;
Sheehan, M. E. .
HYDROMETALLURGY, 2007, 86 (1-2) :44-55
[9]   DIFFUSION OF NEUTRAL AND CHARGED SPECIES UNDER SMALL-SIGNAL AC CONDITIONS [J].
FRANCESCHETTI, DR ;
MACDONALD, JR .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1979, 101 (03) :307-316
[10]   Diffusion impedance and equivalent circuit of a multilayer film [J].
Freger, V .
ELECTROCHEMISTRY COMMUNICATIONS, 2005, 7 (09) :957-961