Combining Measurement and Control Functions in the Structure of a Multilayer Piezoelectric Actuator of Nano- and Micro-Motions

被引：4

作者：

Bardin, V. A. ^{[1
]}

Vasil'ev, V. A. ^{[1
]}

机构：

[1] Pensa State Univ, Pensa, Russia

来源：

MEASUREMENT TECHNIQUES | 2017年 / 60卷 / 07期

关键词：

piezoelectric actuator; self-sensing actuator; multilayer structure; control; nano- and micro-motion; precision positioning;

D O I：

10.1007/s11018-017-1259-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The principles of creating precision positioning devices based on the piezoelectric effect were studied. A promising scientific direction in the development of piezo actuators is distinguished - the creation of self-sensing devices simultaneously performing functions of an actuating mechanism (actuator) and primary measuring transducer (feedback sensor). An original structure of an adaptive multilayer piezoelectric actuator of nano- and micro-motions was developed. Its structural scheme is given and its advantages are shown.

引用

页码：711 / 716

页数：6

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