[1] Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150080, Heilongjiang, Peoples R China
[2] Harbin Inst Technol, Acad Fundamental & Interdisciplinary Sci, Harbin 150080, Heilongjiang, Peoples R China
[3] Univ Elect Sci & Technol China, Ctr Publ Secur Informat & Equipment Integrat Tech, Sch Phys Elect, Chengdu 610054, Sichuan, Peoples R China
[4] Harbin Inst Technol, Sch Chem & Chem Engn, Harbin 150001, Heilongjiang, Peoples R China
[5] Harbin Inst Technol, Inst Adv Ceram, Harbin 150001, Heilongjiang, Peoples R China