Sprayed and thermally evaporated SnO2 thin films for ethanol sensors

被引：58
作者：
Brousse, T
Schleich, DM
机构：
[1] Lab. de Génie des Mat., ISITEM, F44087 Nantes Cedex 03, rue Christian Pauc
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 31卷 / 1-2期
关键词：
tin dioxide thin film; ethanol sensor; spray pyrolysis; thermal evaporation;
D O I：
10.1016/0925-4005(96)80019-0
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Tin dioxide thin films have been prepared by both spray pyrolysis and thermal evaporation on alumina substrates. The main purpose was to determine suitable microstructural and electrical properties for ethanol sensors. Chlorine content in precursor solutions used in the spray pyrolysis technique affects both the structural and the electrical properties of the films. Chlorine-free precursors were prepared to achieve porous SnO2 films. Ethanol sensing properties were determined and compared to thermally evaporated films.
引用
收藏
页码：77 / 79
页数：3
相关论文
共 8 条
[1]  
GAUTHERON B, 1993, SENSOR ACTUAT B-CHEM, V15, P357
[2]   EFFECT OF DOPANT INCORPORATION ON STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED SNO2-SB FILMS [J].
GOYAL, DJ ;
AGASHE, C ;
MARATHE, BR ;
TAKWALE, MG ;
BHIDE, VG .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (11) :7520-7523
[3]  
HORILLO MC, 1994, SENSOR ACTUAT A-PHYS, V41, P619
[4]   SURFACE PROCESSES IN THE DETECTION OF REDUCING GASES WITH SNO2-BASED DEVICES [J].
KOHL, D .
SENSORS AND ACTUATORS, 1989, 18 (01) :71-113
[5]   THIN-FILMS FOR GAS SENSORS [J].
LALAUZE, R ;
BREUIL, P ;
PIJOLAT, C .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (03) :175-182
[6]   ANALYSIS OF THE EFFECTS OF SUBSTRATE-TEMPERATURE, CONCENTRATION OF TIN CHLORIDE AND NATURE OF DOPANTS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF SPRAYED SNO2 FILMS [J].
MESSAD, A ;
BRUNEAUX, J ;
CACHET, H ;
FROMENT, M .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (19) :5095-5103
[7]   A NEW TECHNIQUE FOR THE PREPARATION OF HIGHLY SENSITIVE HYDROGEN SENSORS BASED ON SNO2 (BI2O3) THIN-FILMS [J].
SBERVEGLIERI, G ;
GROPPELLI, S ;
NELLI, P ;
CAMANZI, A .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 5 (1-4) :253-255
[8]   ELECTRICAL AND OPTICAL-PROPERTIES OF UNDOPED AND ANTIMONY-DOPED TIN OXIDE-FILMS [J].
SHANTHI, E ;
DUTTA, V ;
BANERJEE, A ;
CHOPRA, KL .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6243-6251
1