Investigation of 3C-SiC epitaxial layers grown by sublimation epitaxy

被引：18

作者：

Davydov, DV

Lebedev, AA

Tregubova, AS

Kozlovski, VV

Kuznetsov, AN

Bogdanova, EV

机构：

[1] Russian Acad Sci, AF Ioffe Physicotech Inst, RU-194021 St Petersburg, Russia

[2] St Petersburg State Tech Univ, RU-194251 St Petersburg, Russia

来源：

SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2 | 2000年 / 338-3卷

关键词：

carbon vacancy; deep centers; DLTS; proton irradiation; sublimation heteropolytype epitaxy; X-ray topography;

D O I：

10.4028/www.scientific.net/MSF.338-342.221

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The objective of the present work was to prepare 3C-SiC epilayers on base of 6H-SiC substrate and to study epilayer's parameters. Heteroepitaxy was carried out using sublimation epitaxy (SE) in an open system. The presence of 3C-SiC layer in the prepared structures was confirmed by X-ray diffraction. Parameters of Schottky diodes prepared on base of this epilayers were investigated by capacitance-voltage characteristics and DLTS. Also it was investigated influence of proton irradiation and annealing on epilayers Nd-Na value and deep centres concentration.

引用

页码：221 / 224

页数：4

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