Photonic devices based on preferential etching

被引：19
作者：
Bellini, B
Larchanché, JF
Vilcot, JP
Decoster, D
Beccherelli, R
d'Alessandro, A
机构：
[1] Univ Roma La Sapienza, Dept Elect Engn, I-00185 Rome, Italy
[2] Univ Sci & Tech Lille Flandres Artois, CNRS, UMR 8520, Inst Microelect Nord, F-59652 Villeneuve Dascq, France
[3] Sez Roma, Inst Microelettron & Microsistemi, CNR, Rome, Italy
来源：
APPLIED OPTICS | 2005年 / 44卷 / 33期
关键词：
D O I：
10.1364/AO.44.007181
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration. (c) 2005 Optical Society of America.
引用
收藏
页码：7181 / 7186
页数：6
相关论文
共 16 条
[1]  
ALDUINO A, 2004, INTEL TECHNOL, V8, P115
[2]   Vertically tapered polymer waveguide mode size transformer for improved fiber coupling [J].
Chen, AT ;
Chuyanov, V ;
Marti-Carrera, FI ;
Garner, S ;
Steier, WH ;
Chen, JH ;
Sun, SJ ;
Dalton, LR .
OPTICAL ENGINEERING, 2000, 39 (06) :1507-1516
[3]   A process for the formation of submicron V-gate by micromachined V-grooves using GaInP/GaAs selective etching technique [J].
Chiu, HW ;
Ho, NS ;
Lu, SS .
IEEE ELECTRON DEVICE LETTERS, 2001, 22 (09) :420-422
[4]   Integrated optic devices using liquid crystals: design and fabrication issues [J].
d'Alessandro, A ;
Asquini, R ;
Bellini, RP ;
Donisi, D ;
Beccherelli, R .
LIQUID CRYSTALS VIII, 2004, 5518 :123-135
[5]   Engineering liquid crystals for optimal uses in optical communication systems [J].
De La Tocnaye, JLD .
LIQUID CRYSTALS, 2004, 31 (02) :241-269
[6]   Advances in polymer integrated optics [J].
Eldada, L ;
Shacklette, LW .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2000, 6 (01) :54-68
[7]  
INABA R, 1997, IEEE PHOTONIC TECH L, V9, P761
[8]   All-polymer photonic devices using excimer laser micromachining [J].
Jiang, J ;
Callender, CL ;
Noad, JP ;
Walker, RB ;
Mihailov, SJ ;
Ding, J ;
Day, M .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (02) :509-511
[9]   FINITE-ELEMENT ANALYSIS OF OPTICAL-WAVEGUIDES [J].
MABAYA, N ;
LAGASSE, PE ;
VANDENBULCKE, P .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1981, 29 (06) :600-605
[10]   Semiconductor device to optical fiber coupling using low-loss glass taper waveguide [J].
Mashayekhi, M ;
Touam, T ;
Wang, WJ ;
Berolo, E ;
Najafi, SI .
OPTICAL ENGINEERING, 1997, 36 (12) :3476-3477
12