Deposition of nanocrystalline diamond films on temperature sensitive substrates for infrared reflectance spectroscopy

被引：12

作者：

Babchenko, Oleg ^{[1
,2
]}

Remes, Zdenek ^{[1
]}

Izak, Tibor ^{[1
]}

Rezek, Bohuslav ^{[1
]}

Kromka, Alexander ^{[1
]}

机构：

[1] Acad Sci Czech Republic, Inst Phys, Prague 16200 6, Czech Republic

[2] Czech Tech Univ, Fac Nucl Sci & Phys Engn, Prague 12000, Czech Republic

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2011年 / 248卷 / 11期

关键词：

focused plasma; glass substrate; infrared spectroscopy; nanocrystalline diamond; surface wave plasma; PROTECTIVE-COATINGS; SURFACES;

D O I：

10.1002/pssb.201100119

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We report on the deposition of nanocrystalline diamond films onto protected aluminum/pyrex glass mirrors in focused or linear antenna microwave plasma enhanced chemical vapour deposition systems. Quality of the diamond films is characterized by Raman spectroscopy, scanning electron microscopy and optical images. The best material quality and coating uniformity is achieved in the linear antenna system. Infrared reflectance spectroscopy reveals enhanced reflection from the substrates prepared in the linear antenna system compared to diamond coatings prepared in common focused plasma system on protected aluminium/pyrex glass mirrors as well as on polished Si wafers. Linear antenna system diamond coatings are thus the most promising for spectroscopic characterization of molecular grafting to diamond. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：2736 / 2739

页数：4

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