Design, Fabrication and Characterization of cascaded SOI rib waveguide microring resonators

被引:0
作者
Hu, Yingtao [1 ]
Xiao, Xi [1 ]
Zhu, Yu [1 ]
Xu, Haihua [1 ]
Zhou, Liang [1 ]
Li, Yuntao [1 ]
Fan, Zhongchao [2 ]
Li, Zhiyong [1 ]
Yu, Yude [1 ]
Yu, Jingzhong [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China
来源
2010 7TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP) | 2010年
基金
中国国家自然科学基金;
关键词
SILICON; COMPACT; CHIP;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a three-stage double channel cascaded microrings integrated with grating couplers based on SOI rib waveguide. The resonant frequencies were well matched at the drop-port and still splitting at the through-port which was considered to be due to fabrication variations. Flat-top and broadened bandwidth were achieved in the three-stage microring device.
引用
收藏
页码:216 / 218
页数:3
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