Application of infrared Fourier transform phase-modulated ellipsometry to the characterization of silicon-based amorphous thin films

被引：2

作者：

Canillas, A ^{[1
]}

Pascual, E ^{[1
]}

Andujar, JL ^{[1
]}

Campmany, J ^{[1
]}

Bertran, E ^{[1
]}

机构：

[1] Univ Barcelona, Dept Fis Aplicada & Elect, E-08028 Barcelona, Spain

来源：

THIN SOLID FILMS | 1998年 / 313卷

关键词：

ellipsometry; infrared spectroscopy; amorphous silicon; silicon dioxide; optical properties; structural properties;

D O I：

10.1016/S0040-6090(97)00975-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Multilayers of silicon-based amorphous thin films were characterized to test the performance of Fourier transform phase-modulated ellipsometry (FTPME) in absolute measurements (thickness and refractive index). The multilayers consist of a stack of silicon dioxide (SiO2), hydrogenated amorphous silicon (a-Si:H) and NiCr thin films on c-Si substrates. Results provided by FTPME are compared with those from UV-visible phase-modulated ellipsometry and transmission electron microscopy. The thicknesses of the layers determined by the three techniques agrees within 3%. Similar volume void fractions of approximately 8% for the silicon dioxide layers are found by UV-visible and IR ellipsometry. (C) 1998 Elsevier Science S.A.

引用

收藏

页码：671 / 675

页数：5

相关论文

共 14 条

[1] REAL-TIME CONTROLLED RF REACTOR FOR DEPOSITION OF A-SI - H THIN-FILMS [J].

ANDUJAR, JL ;

BERTRAN, E ;

CANILLAS, A ;

ESTEVE, J ;

ANDREU, J ;

MORENZA, JL .

VACUUM, 1989, 39 (7-8) :795-798

[2] OPTICAL, VIBRATIONAL AND COMPOSITIONAL STUDY OF AMORPHOUS-SILICON OXYNITRIDE THIN-FILMS GROWN BY AN RF PLASMA USING N2O+SIH4 GAS-MIXTURES [J].

CAMPMANY, J ;

ANDUJAR, JL ;

CANILLAS, A ;

COSTA, J ;

BERTRAN, E .

APPLIED SURFACE SCIENCE, 1993, 70-1 :695-700

[3] PHASE-MODULATED ELLIPSOMETER USING A FOURIER-TRANSFORM INFRARED SPECTROMETER FOR REAL-TIME APPLICATIONS [J].

CANILLAS, A ;

PASCUAL, E ;

DREVILLON, B .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (08) :2153-2159

[4] INSITU SPECTROELLIPSOMETRIC STUDY OF THE NUCLEATION AND GROWTH OF AMORPHOUS-SILICON [J].

CANILLAS, A ;

BERTRAN, E ;

ANDUJAR, JL ;

DREVILLON, B .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (06) :2752-2759

[5] INSITU OPTICAL CHARACTERIZATIONS FOR RF PLASMA DEPOSITED A-SI - H THIN-FILMS [J].

CANILLAS, A ;

BERTRAN, E ;

ANDUJAR, JL ;

MORENZA, JL .

VACUUM, 1989, 39 (7-8) :785-787

[6] Calibration improvement of Fourier transform infrared phase-modulated ellipsometry [J].

Canillas, A ;

Pascual, E ;

Bertran, E .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (12) :2461-2467

[7] AN IR PHASE-MODULATED ELLIPSOMETER USING A FOURIER-TRANSFORM SPECTROMETER FOR IN-SITU APPLICATIONS [J].

CANILLAS, A ;

PASCUAL, E ;

DREVILLON, B .

THIN SOLID FILMS, 1993, 234 (1-2) :318-322

[8] VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM [J].

CARDONA, M .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02) :463-481

[9] SPECTROSCOPIC ELLIPSOMETRY FOR THE CHARACTERIZATION OF THIN-FILMS [J].

FERRIEU, F ;

LECAT, JH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (07) :2203-2208

[10] OPTICAL-CONSTANTS OF RF SPUTTERED HYDROGENATED AMORPHOUS SI [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1979, 20 (02) :716-728