Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform

被引：1

作者：

Yu, YJ ^{[1
]}

Zhang, BH ^{[1
]}

Jiao, YF ^{[1
]}

机构：

[1] Shanghai Univ, Dept Precis Mech Engn, Shanghai 200072, Peoples R China

来源：

ADVANCED CHARACTERIZATION TECHNIQUES FOR OPTICS, SEMICONDUCTORS, AND NANOTECHNOLOGIES | 2003年 / 5188卷

关键词：

phase-shifting interferometry via wavelength tuning; phase-shifting algorithm Fourier transform; step measurement;

D O I：

10.1117/12.505523

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The phase-shifting algorithm via wavelength tuning based on temporal Fourier transform is according to the Fourier transform technique and the difference technique to realize the processing of the interferogram.This algorithm is applied to test some course profiles or the topography with high steps. The paper describes its main idea and presents the shortcoming of the algorithm proposed by Takeda.Then it puts forward the improved algorithml.The pape describes the realization processing and the errors of the new algorithm. Fin ally, it supplies the measurement result.

引用

页码：343 / 350

页数：8

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