Simulation of adsorption-induced stress of a microcantilever sensor

被引：72

作者：

Dareing, DW ^{[1
]}

Thundat, T

机构：

[1] Univ Tennessee, Dept Mech Aerosp & Biomed Engn, Knoxville, TN 37996 USA

[2] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2005年 / 97卷 / 04期

关键词：

D O I：

10.1063/1.1853496

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Molecular adsorption on a microcantilever surface causes the cantilever to bend as a result of adsorption-induced stresses. A model for adsorption-induced surface stress based on atomic or molecular interaction is proposed. The model was tested with mercury adsorption on gold-coated cantilevers. Calculated deflections based on the proposed simulation model agree well with measured deflection data. This model gives insight into the interatomic forces that play a significant role in creating adsorption-induced surface stresses and resultant mechanical bending of microcantilevers. (C) 2005 American Institute of Physics.

引用

页数：5

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