Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

被引:205
作者
Liao, Yang [2 ]
Song, Jiangxin [2 ]
Li, En [3 ]
Luo, Yong [1 ]
Shen, Yinglong [2 ]
Chen, Danping [2 ]
Cheng, Ya [2 ]
Xu, Zhizhan [2 ]
Sugioka, Koji [4 ]
Midorikawa, Katsumi [4 ]
机构
[1] Dalian Univ Technol, Sch Pharmaceut Sci & Technol, Dalian 116024, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[3] Nankai Univ, Coll Phys Sci, Tianjin 300071, Peoples R China
[4] RIKEN, Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan
基金
中国国家自然科学基金;
关键词
DEVICE; CHIP; MICROMIXERS; NETWORKS; CHANNEL; SYSTEMS; SILICA; PULSES;
D O I
10.1039/c2lc21015k
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
The creation of complex three-dimensional (3D) microfluidic systems has attracted significant attention from both scientific and applied research communities. However, it is still a formidable challenge to build 3D microfluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. Here, we demonstrate rapid fabrication of high-aspect-ratio microfluidic channels with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate a 3D passive microfluidic mixer and characterize its functionalities. This technology will enable rapid construction of complex 3D microfluidic devices for a wide array of lab-on-a-chip applications.
引用
收藏
页码:746 / 749
页数:4
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