Low-loss silicon nitride waveguide hybridly integrated with colloidal quantum dots

被引：32
|
作者：
Xie, Weiqiang [1 ,2 ]
Zhu, Yunpeng [1 ,2 ]
Aubert, Tangi [2 ,3 ]
Verstuyft, Steven [1 ,2 ]
Hens, Zeger [2 ,3 ]
Van Thourhout, Dries [1 ,2 ]
机构：
[1] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, B-9000 Ghent, Belgium
[2] Univ Ghent, Ctr Nano & Biophoton, B-9000 Ghent, Belgium
[3] Univ Ghent, Phys & Chem Nanostruct, B-9000 Ghent, Belgium
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 09期
关键词：
OPTICAL-PROPERTIES; FABRICATION; PHOTONICS; NANOCRYSTALS; ENHANCEMENT; WAVELENGTHS; RESONATORS; PLATFORM; CAVITY; SI;
D O I：
10.1364/OE.23.012152
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Silicon nitride waveguides with a monolayer of colloidal quantum dots embedded inside were fabricated using a low-temperature deposition process and an optimized dry etching step for the composite layers. We experimentally demonstrated the luminescence of the embedded quantum dots is preserved and the loss of these hybrid waveguide wires is as low as 2.69dB/cm at 900nm wavelength. This hybrid integration of low loss silicon nitride photonics with active emitters offers opportunities for optical sources operating over a very broad wavelength range. (C) 2015 Optical Society of America
引用
收藏
页码：12152 / 12160
页数：9
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