Titanium dioxide slot waveguides for visible wavelengths

被引：22

作者：

Hayrinen, Markus ^{[1
]}

Roussey, Matthieu ^{[1
]}

Saynatjoki, Antti ^{[1
,2
]}

Kuittinen, Markku ^{[1
]}

Honkanen, Seppo ^{[1
]}

机构：

[1] Univ Eastern Finland, Inst Photon, FI-80101 Joensuu, Finland

[2] Aalto Univ, Dept Micro & Nanosci, FI-02150 Espoo, Finland

来源：

APPLIED OPTICS | 2015年 / 54卷 / 10期

基金：

芬兰科学院;

关键词：

ATOMIC LAYER DEPOSITION; RING-RESONATOR; SENSOR;

D O I：

10.1364/AO.54.002653

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present the first, to our knowledge, experimental demonstration of a titanium dioxide slot waveguide operating in the visible range of light. Ring resonators based on slot waveguides were designed, fabricated, and characterized for lambda similar or equal to 650 nm. The fabrication method includes atomic layer deposition, electron beam lithography, and reactive ion etching. The required narrow slot widths of a few tens of nanometers were achieved by using a conformal atomic layer re-coating technique. This unique feature-size-reduction technique was applied after the final etching step. (C) 2015 Optical Society of America

引用

页码：2653 / 2657

页数：5

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