Microrelief Measurements for White-Light Interferometer with Adaptive Algorithm Interferogram Processing

被引：1
|
作者：
Sysoev, Evgeny V. [1 ]
Kulikov, Rodion V. [1 ]
机构：
[1] Russian Acad Sci, Siberian Branch, TDI SIE, Novosibirsk 630058, Russia
来源：
MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS IX | 2010年 / 437卷
关键词：
Relief Measurement; Interference; Surface Quality Inspection; Thresholding;
D O I：
10.4028/www.scientific.net/KEM.437.35
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The problem of reducing measurement errors of surface microrelief with nonuniform scattering properties using white-light interferometer was discussed. Adaptive algorithm of thresholding which allows us to set optimal threshold in every point of measuring surface was proposed. Application of this algorithm of threshold choice allows increasing dynamical range of interference detection more than in 10 times. The dependences of scanning interferometer resolution on differentional interferogram thresholding have been discussed.
引用
收藏
页码：35 / 39
页数：5
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