Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters

被引：8

作者：

Palei, W ^{[1
]}

Liu, AQ ^{[1
]}

Yu, AB ^{[1
]}

Alphones, A ^{[1
]}

Lee, YH ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 119卷 / 02期

关键词：

MEMS; capacitive shunt switch; distributed MEMS transmission line (DMTL); true time delay (TTD) phase shifter; radio frequency (RF);

D O I：

10.1016/j.sna.2004.10.006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Distributed techniques have been widely employed as a solution to obtain wide band circuits at microwave and millimeter wave band. This paper presents five different designs for true-time delay (TTD) phase shifters that are based on characteristic impedance of 75, 65 and 50 Omega coplanar waveguide (CPW) distributed microelectromechanical systems (MEMS) transmission line (DMTL), which are loaded with different designs and number of shunt capacitive switches. The TTD phase shifters are fabricated on a 675 mu m high resistivity silicon (Si) wafer using surface micromachining process. The design operates up to Ku band with a measured return loss below - 15 dB and an average loss of 2.3 dB/phase shift of 250 degrees at 20 GHz. The TTD phase shifters have wide applications for high-performance of microwave and millimeter-wave integrated circuits. (c) 2004 Published by Elsevier B.V.

引用

页码：446 / 454

页数：9

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