Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

被引：15

作者：

Min, KS

Choi, WC

Song, SH

Hwang, EJ

机构：

[1] Korea Univ, Dept Mech Engn, Precis Technol Lab, Seoul 136701, South Korea

[2] Korea Univ, Grad Sch, Seoul 136701, South Korea

来源：

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE | 2005年 / 219卷 / 06期

关键词：

flexure; stage; lever mechanism; flexure hinge; static analysis; dynamic analysis;

D O I：

10.1243/095440505X32355

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

引用

页码：447 / 454

页数：8

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