Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

被引：14

作者：

Bich, A. ^{[1
]}

Rieck, J. ^{[1
]}

Dumouchel, C. ^{[1
]}

Roth, S. ^{[1
]}

Weible, K. J. ^{[1
]}

Eisner, M. ^{[1
]}

Voelkel, R. ^{[1
]}

Zimmermann, M. ^{[2
]}

Rank, M. ^{[2
]}

Schmidt, M. ^{[2
]}

Bitterli, R. ^{[3
]}

Ramanan, N. ^{[3
]}

Ruffieux, P. ^{[3
]}

Scharf, T. ^{[3
]}

Noell, W. ^{[3
]}

Herzig, H. -P. ^{[3
]}

de Rooij, Nico ^{[3
]}

机构：

[1] SUSS Microopt SA, Jaquet Droz 7, CH-2000 Neuchatel, Switzerland

[2] Bayer Laserzentrum GmbH, D-91052 Erlangen, Germany

[3] Univ Neuchatel, Inst Microtechnol IMT, CH-2000 Neuchatel, Switzerland

来源：

PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS VII | 2008年 / 6879卷

关键词：

beam homogenizer; spot array generator; flat-top; laser light sheet; micro-optics; microlens arrays; linear diffuser; micromirrors; MEMS;

D O I：

10.1117/12.762923

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Refractive, diffractive and reflective micro-optical elements for laser beam shaping and homogenizing have been manufactured and tested. The presented multifunctional optical elements are used for shaping arbitrary laser beam profiles into a variety of geometries like, a homogeneous spot array or line pattern, a laser light sheet or flat-top intensity profiles. The resulting profiles are strongly influenced by the beam properties of the laser and by diffraction and interference effects at the micro-optical elements. We present general design rules for beam shaping and homogenizing. We demonstrate the application of such multifunctional micro-optical elements for a variety of applications from microlaser machining to laser diagnostic systems.

引用

页数：12

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