Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

被引：14

作者：

Bich, A. ^{[1
]}

Rieck, J. ^{[1
]}

Dumouchel, C. ^{[1
]}

Roth, S. ^{[1
]}

Weible, K. J. ^{[1
]}

Eisner, M. ^{[1
]}

Voelkel, R. ^{[1
]}

Zimmermann, M. ^{[2
]}

Rank, M. ^{[2
]}

Schmidt, M. ^{[2
]}

Bitterli, R. ^{[3
]}

Ramanan, N. ^{[3
]}

Ruffieux, P. ^{[3
]}

Scharf, T. ^{[3
]}

Noell, W. ^{[3
]}

Herzig, H. -P. ^{[3
]}

de Rooij, Nico ^{[3
]}

机构：

[1] SUSS Microopt SA, Jaquet Droz 7, CH-2000 Neuchatel, Switzerland

[2] Bayer Laserzentrum GmbH, D-91052 Erlangen, Germany

[3] Univ Neuchatel, Inst Microtechnol IMT, CH-2000 Neuchatel, Switzerland

来源：

PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS VII | 2008年 / 6879卷

关键词：

beam homogenizer; spot array generator; flat-top; laser light sheet; micro-optics; microlens arrays; linear diffuser; micromirrors; MEMS;

D O I：

10.1117/12.762923

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Refractive, diffractive and reflective micro-optical elements for laser beam shaping and homogenizing have been manufactured and tested. The presented multifunctional optical elements are used for shaping arbitrary laser beam profiles into a variety of geometries like, a homogeneous spot array or line pattern, a laser light sheet or flat-top intensity profiles. The resulting profiles are strongly influenced by the beam properties of the laser and by diffraction and interference effects at the micro-optical elements. We present general design rules for beam shaping and homogenizing. We demonstrate the application of such multifunctional micro-optical elements for a variety of applications from microlaser machining to laser diagnostic systems.

引用

页数：12

共 50 条

[1] Application of ultrafast laser beam shaping in micro-optical elements
Qu, Zhihao
Sun, Shufeng
Wang, Jin
Jiang, Mingming
Zhang, Fengyun
Wang, Xi
Shao, Jing
Liang, Guanglei
Wang, Pingping
JOURNAL OF LASER APPLICATIONS, 2023, 35 (03)
[2] Micro-optical freeform elements for beam-shaping
Infante-Gomez, Daniel
Herzig, Hans Peter
OPTICAL SYSTEMS DESIGN 2015: COMPUTATIONAL OPTICS, 2015, 9630
[3] Liquid Crystal Pancharatnam-Berry Micro-Optical Elements for Laser Beam Shaping
Jiang, Miao
Yu, Hao
Feng, Xiayu
Guo, Yubing
Chaganava, Irakli
Turiv, Taras
Lavrentovich, Oleg D.
Wei, Qi-Huo
ADVANCED OPTICAL MATERIALS, 2018, 6 (23):
[4] Optical trapping and micromanipulation using micro-beam shaping created by micro-optical elements
Yuan, XC
Lee, WM
Cheong, WC
Tao, SH
Ahluwalia, BS
Moh, KJ
He, M
Niu, HB
Peng, X
Holography, Diffractive Optics, and Applications II, Pts 1 and 2, 2005, 5636 : 27 - 33
[5] Beam shaping and fiber coupling for LD stacks with micro-optical elements array
State Key Lab. of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Acad. of Sci., Chengdu 610209, China
Hongwai yu Jiguang Gongcheng, 2009, 3 (452-455):
[6] Beam shaping and fiber coupling for LD stacks with micro-optical elements array
Zhou, Chong-Xi
Du, Chun-Lei
Xie, Wei-Min
Yang, Huan
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2009, 38 (03): : 452 - 455
[7] Microlens beam shaping and homogenizing optical system for excimer laser
Jin, Yuhua
Zhao, Yan
Jiang, Yijian
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 42 (06):
[8] Fabrication and properties of refractive micro-optical profiles for lenses, lens arrays and beam shaping elements
Kley, EB
Cumme, M
Wittig, LC
Tünnermann, A
ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000, 2000, 4231 : 144 - 152
[9] Laser beam shaping by holographic optical elements
Kukhtarev, N
Kukhtareva, T
Glebov, L
Smirnov, V
Schrimpf, JT
Thomas, JG
NONLINEAR OPTICS OF LIQUID AND PHOTOREFRACTIVE CRYSTALS, 2003, 5257 : 152 - 162
[10] Tailored micro-optical freeform holograms for integrated complex beam shaping
Schmidt, Soeren
Thiele, Simon
Toulouse, Andrea
Boesel, Christoph
Tiess, Tobias
Herkommer, Alois
Gross, Herbert
Giessen, Harald
OPTICA, 2020, 7 (10): : 1279 - 1286

← 1 2 3 4 5 →